2020 Small

Scalable design of two‐dimensional oxide nanosheets for construction of ultrathin multilayer nanocapacitors

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M-S. Khan, H-J. Kim, Y-H. Kim, Y. Ebina, W. Sugimoto, T. Sasaki, M. Osada: “Scalable design of two‐dimensional oxide nanosheets for construction of ultrathin multilayer nanocapacitors”, Small, 16, 2003485 (2020).

DOI: 10.1002/smll.202003485

Abstract

Large size of capacitors is the main hurdle in miniaturization of current electronic devices. Herein, a scalable solution‐based layer‐by‐layer engineering of metallic and high‐κ dielectric nanosheets into multilayer nanosheet capacitors (MNCs) with overall thickness of ≈20 nm is presented. The MNCs are built through neat tiling of 2D metallic Ru0.95O20.2− and high‐κ dielectric Ca2NaNb4O13 nanosheets via the Langmuir–Blodgett (LB) approach at room temperature which is verified by cross‐sectional high‐resolution transmission electron microscopy (HRTEM). The resultant MNCs demonstrate a high capacitance of 40–52 µF cm−2 and low leakage currents down to 10−5–10−6 A cm−2. Such MNCs also possess complimentary in situ robust dielectric properties under high‐temperature measurements up to 250 °C. Based on capacitance normalized by the thickness, the developed MNC outperforms state‐of‐the‐art multilayer ceramic capacitors (MLCC, ≈22 µF cm−2/5 × 104 nm) present in the market. The strategy is effective due to the advantages of facile, economical, and ambient temperature solution assembly.

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